AOIAOI is an auto professional visual inspection system for wafer defect inspection and the soft/ hardware integration system.

AOI provides the R.G.B. full color camera, the reducing inspection technology. The four times house-lens is able to map different wafer sizes and quickly find out all kinds of defects that can effectively increase the good quality on manufacturing production.


MueTec 3000

MueTec 3000 is a fully automated process control tool that provides a unique combination of defect inspection, defect review, CD, overlay, film thickness and 3D surfaces measurement applications. Defect inspection and defect review are now available in sidible, ultraviolet and infrared light. An all-in-one system for companies looking for a cost-effective solution.