TLJ系列


Spin coat, Spray Coater, Developer
•Upto 200mm water
•Manual Semi-Auto,fully Automatic
•MEMS 3D,Si,玻璃基板
•客製化設計

       

High performance Spin Coating 
•FPD mask up to G8
•Coating Uniformity:±1%
          


Slit Coater

•Coater:FPD Glass up to G8
•Film coating,FPD Line

          

Hot Baking/ Chiller plate
•高精度:±0.3℃
•VCD設備